|
¡á »ç¾ç |
MODEL |
Microhead
Position |
Z-Stage
Type |
Stage
Surface(mm) |
Stroke |
Resolution
(mm) |
Travel
Guide |
Material |
LOAD
CAPACITY |
Weight
(kg) |
DownLoad |
ZX-25A |
Left/Right
/Center |
Vertical |
25 ¡¿ 25 |
¡¾3 |
10um/division
(0.01) |
Cross/Roller |
AL6061 |
0.5 [kgf] |
0.047 |
|
ZX-40A |
Left/Right
/Center |
Vertical |
40 ¡¿ 40 |
¡¾6.5 |
10um/division
(0.01) |
Cross/Roller |
AL6061 |
1 [kgf] |
0.137 |
|
ZX-60A |
Left/Right
/Center |
Vertical |
60 ¡¿ 60 |
¡¾6.5 |
10um/division
(0.01) |
Cross/Roller |
AL6061 |
2 [kgf] |
0.28 |
|
ZX-80A |
Left/Right
/Center |
Vertical |
80 ¡¿ 80 |
¡¾12.5 |
10um/division
(0.01) |
Cross/Roller |
AL6061 |
5 [kgf] |
0.49 |
|
ZX-100A |
Left/Right
/Center |
Vertical |
100 ¡¿ 100 |
¡¾12.5 |
10um/division
(0.01) |
Cross/Roller |
AL6061 |
5.5 [kgf] |
0.65 |
|
|
|