|
¡á LD »ç¾ç |
MODEL |
Microhead
Position |
Stage
Surface(mm) |
Straight
ness(mm) |
Travel
Range(mm) |
Resolution
(mm) |
LOAD
CAPACITY |
Weight(kg) |
µµ¸é |
LD-100st |
Center
|
100 X 100 |
0.03 |
200 |
0.05/Vernier |
15 [kgf] |
1.5 |
|
LD-120st |
Center |
100 X 100 |
0.03 |
200 |
0.05/Vernier |
- [kgf] |
- |
|
LD-270st |
Center |
100 X 100 |
¡¾25 |
270 |
0.1/Vernier |
20 [kgf] |
3.0 |
|
|
|