| |
| ■ X축 사양 |
| MODEL |
Microhead
Position |
Stage
Surface
(mm) |
Travel
Range(mm) |
Straignt
ness
(mm) |
Max
Speed
|
LOAD
CAPACITY |
Weight
(kg) |
도면 |
| MX - 6020(L,R) |
Left, Right
|
60 X 60 |
±10 |
0.008 |
20mm/sec |
4 [kgf] |
0.57 |
  |
| MX - 6050(L,R) |
Left, Right
|
60 X 50 |
±25 |
0.008 |
20mm/sec |
4 [kgf] |
0.65 |
|
| MX - 8030(L,R) |
Left, Right
|
80 X 80 |
±15 |
0.01 |
20mm/sec |
12 [kgf] |
1.32 |
|
| MX - 8050(L,R) |
Left, Right
|
80 X 100 |
±25 |
0.01 |
20mm/sec |
15 [kgf] |
1.6 |
|
MX - 80100
(Sensor-in) |
Left, Right
|
100 X 230 |
±50 |
0.01 |
20mm/sec |
18 [kgf] |
2.0 |
|
|
| ■ Z축 사양 |
| MODEL |
Microhead
Position |
Stage
Surface
(mm) |
Travel
Range(mm) |
Straignt
ness
(mm) |
Max
Speed
|
LOAD
CAPACITY |
Weight
(kg) |
도면 |
| MZH - 60(L,R) |
Left, Right
|
60 X 80 |
±2 |
0.03 |
3.6mm/sec |
7 [kgf] |
1.14 |
|
| MZH - 108(L,R) |
Left, Right
|
100 X 80 |
±5 |
0.03 |
3.6mm/sec |
8 [kgf] |
1.8 |
|
|
|
스텝제품
